描述
KLA-Tencor Surfscan 6200 particle counter . Installed in Clean-room..配置
Working - Wafer Size : 4 - 8 inch. - Non-patterned surface Inspection System. - 0.1 micron Defect Sensitivity (PSL STD). - 0.02 ppm Haze Sensitivity. - 0.002 ppm Haze Resolution. - Accuracy within 1%. - XY coordinates. - Lock Down accessories. - Tencor approved blower assembly. - 30mW New Ar-Laser - 208V/60HZ, 17A. - MS-DOS 6.22 ,Windows 3.1. - Software version: 2.1.OEM 代工型號說明
The Surfscan 6200 is a tool that is capable of detecting defects as small as 0.09 µm with an 80% capture rate. It can locate, measure the size of, and count these defects to provide detailed information about the surface being analyzed.文檔
無文檔
類別
Defect Inspection
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
65986
晶圓尺寸:
8"/200mm
年份:
1994
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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KLA
SURFSCAN 6200
類別
Defect Inspection
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
65986
晶圓尺寸:
8"/200mm
年份:
1994
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
KLA-Tencor Surfscan 6200 particle counter . Installed in Clean-room..配置
Working - Wafer Size : 4 - 8 inch. - Non-patterned surface Inspection System. - 0.1 micron Defect Sensitivity (PSL STD). - 0.02 ppm Haze Sensitivity. - 0.002 ppm Haze Resolution. - Accuracy within 1%. - XY coordinates. - Lock Down accessories. - Tencor approved blower assembly. - 30mW New Ar-Laser - 208V/60HZ, 17A. - MS-DOS 6.22 ,Windows 3.1. - Software version: 2.1.OEM 代工型號說明
The Surfscan 6200 is a tool that is capable of detecting defects as small as 0.09 µm with an 80% capture rate. It can locate, measure the size of, and count these defects to provide detailed information about the surface being analyzed.文檔
無文檔