描述
Copper only配置
450 MHz Computer (800Mhz to confirm) Win NT KLA Software 4.1 (New hardrive will be provided) JDSU 30 mw laser Normal (sensitivity 0.080Um) and Oblique (sensitivity 0.060 um) incidence SECS / GEM HSMS DIC XY coordinates Vacuum Handler Dual 300 FIMS Universal Load poarts 300 mm (2 of them) BlowerOEM 代工型號說明
The SP1 is an unpatterned surface inspection system that can be configured with KLA-Tencor’s Triple-Beam Illumination™ (TBI) technology for exceptional sensitivity on rough films. This technology adds an oblique illumination beam to the SP1’s standard optical configuration, enhancing its ability to capture and distinguish all variations of pits, including crystal originated pits (COPs), from particles. The TBI option maintains the SP1’s axi-symmetric design and allows the use of Adaptive Collection Optics for superior capture of defects on different substrate surfaces.文檔
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KLA
SP1-TBI
類別
Defect Inspection
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
78031
晶圓尺寸:
8"/200mm, 12"/300mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Copper only配置
450 MHz Computer (800Mhz to confirm) Win NT KLA Software 4.1 (New hardrive will be provided) JDSU 30 mw laser Normal (sensitivity 0.080Um) and Oblique (sensitivity 0.060 um) incidence SECS / GEM HSMS DIC XY coordinates Vacuum Handler Dual 300 FIMS Universal Load poarts 300 mm (2 of them) BlowerOEM 代工型號說明
The SP1 is an unpatterned surface inspection system that can be configured with KLA-Tencor’s Triple-Beam Illumination™ (TBI) technology for exceptional sensitivity on rough films. This technology adds an oblique illumination beam to the SP1’s standard optical configuration, enhancing its ability to capture and distinguish all variations of pits, including crystal originated pits (COPs), from particles. The TBI option maintains the SP1’s axi-symmetric design and allows the use of Adaptive Collection Optics for superior capture of defects on different substrate surfaces.文檔
無文檔