描述
無描述配置
0.050 um Defect Sensitivity on Polished Bare Silicon Enhanced Rough Film Sensitivity Already upgraded with ENH SS laser Defect Map and Histogram with Zoom RTDC (Real Time Defect Classification) Map to Map Operator Interface Blower UnitOEM 代工型號說明
The Surfscan SP1DLS is an unpatterned wafer inspection system that detects defects down to 50nm and provides complete defectivity and haze information in a single scan. It uses dual-laser illumination and has an optional Backside Inspection Module. It supports 200mm and 300mm wafer sizes and meets 300mm factory automation requirements.文檔
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KLA
SP1 DLS
類別
Defect Inspection
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
123843
晶圓尺寸:
未知
年份:
2004
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述配置
0.050 um Defect Sensitivity on Polished Bare Silicon Enhanced Rough Film Sensitivity Already upgraded with ENH SS laser Defect Map and Histogram with Zoom RTDC (Real Time Defect Classification) Map to Map Operator Interface Blower UnitOEM 代工型號說明
The Surfscan SP1DLS is an unpatterned wafer inspection system that detects defects down to 50nm and provides complete defectivity and haze information in a single scan. It uses dual-laser illumination and has an optional Backside Inspection Module. It supports 200mm and 300mm wafer sizes and meets 300mm factory automation requirements.文檔
無文檔