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SP1 DLS
概述
The Surfscan SP1DLS is an unpatterned wafer inspection system that detects defects down to 50nm and provides complete defectivity and haze information in a single scan. It uses dual-laser illumination and has an optional Backside Inspection Module. It supports 200mm and 300mm wafer sizes and meets 300mm factory automation requirements.
活躍中的上架商品
9
服務
檢驗、保險、評估、物流
