描述
Darkfield Inspection配置
無配置OEM 代工型號說明
The Puma 9150 is a Laser Imaging Patterned Wafer Inspection System developed by KLA Corporation. It combines UV illumination optics with multiple high-speed imaging sensors to offer a range of optical modes for critical defect detection inline on patterned, production wafers. The Puma 9150 provides enhanced capture of low profile, large area defects, such as underpolish and slurry residues from copper CMP. It also improves darkfield defect capture in etch applications, such as microbridges and partially or fully blocked vias.文檔
無文檔
KLA
PUMA 9150
類別
Defect Inspection
上次驗證: 19 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
147692
晶圓尺寸:
12"/300mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Darkfield Inspection配置
無配置OEM 代工型號說明
The Puma 9150 is a Laser Imaging Patterned Wafer Inspection System developed by KLA Corporation. It combines UV illumination optics with multiple high-speed imaging sensors to offer a range of optical modes for critical defect detection inline on patterned, production wafers. The Puma 9150 provides enhanced capture of low profile, large area defects, such as underpolish and slurry residues from copper CMP. It also improves darkfield defect capture in etch applications, such as microbridges and partially or fully blocked vias.文檔
無文檔