描述
無描述配置
無配置OEM 代工型號說明
The Puma 9130 is a Laser Imaging Patterned Wafer Inspection System that combines UV illumination optics with multiple high-speed imaging sensors to offer a range of optical modes for critical defect detection inline on patterned, production wafers1. It delivers high sampling rates, high throughput, and high sensitivity enabling more effective capture and control of yield-impacting defects on critical front-end-of-line (FEOL) and back-end-of-line (BEOL) layers1. The Puma 9130 provides oblique UV illumination while the 9150 also offers an additional, normal illumination mode. Both tools provide three illumination polarizations (S, P, C) and independently configured collection polarization filters (S, P, None) for each of the three channels.文檔
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KLA
PUMA 9130
已驗證
類別
Defect Inspection
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
65430
晶圓尺寸:
未知
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA
PUMA 9130
類別
Defect Inspection
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
65430
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述配置
無配置OEM 代工型號說明
The Puma 9130 is a Laser Imaging Patterned Wafer Inspection System that combines UV illumination optics with multiple high-speed imaging sensors to offer a range of optical modes for critical defect detection inline on patterned, production wafers1. It delivers high sampling rates, high throughput, and high sensitivity enabling more effective capture and control of yield-impacting defects on critical front-end-of-line (FEOL) and back-end-of-line (BEOL) layers1. The Puma 9130 provides oblique UV illumination while the 9150 also offers an additional, normal illumination mode. Both tools provide three illumination polarizations (S, P, C) and independently configured collection polarization filters (S, P, None) for each of the three channels.文檔
無文檔