描述
Metrology / inspection system配置
Known issues: Not included: KVM; SAC Board FOUP Factory Interface Inspection Unit Robot Handler Chiller Process: Darkfield Inspection Software Version: 9.5.410.2.7 CIM: SECS/GEMOEM 代工型號說明
The Puma 9000 is a modular and extendible dark field defect inspection system that uses KLA-Tencor’s Streak imaging technology to capture critical defects at production throughputs. It combines advanced UV illumination optics with high-speed imaging and a solid-state linear sensor to produce stable and repeatable measurements. Its enhanced sensitivity over existing inspection systems allows for cost-optimized inspection strategies and tighter production control.文檔
無文檔
KLA
PUMA 9000
類別
Defect Inspection
上次驗證: 6 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
154807
晶圓尺寸:
12"/300mm
年份:
2005
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Metrology / inspection system配置
Known issues: Not included: KVM; SAC Board FOUP Factory Interface Inspection Unit Robot Handler Chiller Process: Darkfield Inspection Software Version: 9.5.410.2.7 CIM: SECS/GEMOEM 代工型號說明
The Puma 9000 is a modular and extendible dark field defect inspection system that uses KLA-Tencor’s Streak imaging technology to capture critical defects at production throughputs. It combines advanced UV illumination optics with high-speed imaging and a solid-state linear sensor to produce stable and repeatable measurements. Its enhanced sensitivity over existing inspection systems allows for cost-optimized inspection strategies and tighter production control.文檔
無文檔