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PUMA 9000

概述

The Puma 9000 is a modular and extendible dark field defect inspection system that uses KLA-Tencor’s Streak imaging technology to capture critical defects at production throughputs. It combines advanced UV illumination optics with high-speed imaging and a solid-state linear sensor to produce stable and repeatable measurements. Its enhanced sensitivity over existing inspection systems allows for cost-optimized inspection strategies and tighter production control.

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