描述
Metrology / inspection system配置
Known issues: Not included: SGB Board; Exhaust Tubing Hose 3" Metallic; G5 Host Node; TCD Board; (Qty 13) G5 Nodes and RTAP Robot Handler Inspection Unit FOUP Factory Interface Process: Brightfield Inspection Software Version: 104507 CIM: SECS/GEMOEM 代工型號說明
The 2367 UV/visible brightfield inspector is sensitive to a broad range of defects for 65nm and above design nodes. It has improved throughput, high defect sampling, and is field-upgradeable from any 23xx systems. It has a 2x data rate increase, low false count rate, and automatic defect classification algorithms. It can be used with 28xx inspection systems and other KLA-Tencor tools. It also has a Process Window Qualification application for detecting systematic defects.文檔
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KLA
2367
類別
Defect Inspection
上次驗證: 6 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
154831
晶圓尺寸:
12"/300mm
年份:
2009
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Metrology / inspection system配置
Known issues: Not included: SGB Board; Exhaust Tubing Hose 3" Metallic; G5 Host Node; TCD Board; (Qty 13) G5 Nodes and RTAP Robot Handler Inspection Unit FOUP Factory Interface Process: Brightfield Inspection Software Version: 104507 CIM: SECS/GEMOEM 代工型號說明
The 2367 UV/visible brightfield inspector is sensitive to a broad range of defects for 65nm and above design nodes. It has improved throughput, high defect sampling, and is field-upgradeable from any 23xx systems. It has a 2x data rate increase, low false count rate, and automatic defect classification algorithms. It can be used with 28xx inspection systems and other KLA-Tencor tools. It also has a Process Window Qualification application for detecting systematic defects.文檔
無文檔