描述
De-installed配置
-Electric source: 208V/1Ph/16A -Non-patterned wafer film surface analyzer -One automatic wafer handler -Defect map and histogram with zoom -2D signal integration -Non-contaminating robotic handler -X-Y Coordinates Software -Random access sender/receiver unitOEM 代工型號說明
The Surfscan 6420 detects submicron defects on metal films and rough surfaces but still provides sensitivity down to 0.1 micron on polished silicon. It is effective for detecting defects on non-uniform films, a critical requirement for CMP applications.文檔
KLA
SURFSCAN 6420
已驗證
類別
Defect Inspection
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
Deinstalled
產品編號:
102947
晶圓尺寸:
6"/150mm
年份:
1998
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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KLA
SURFSCAN 6420
類別
Defect Inspection
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
Deinstalled
產品編號:
102947
晶圓尺寸:
6"/150mm
年份:
1998
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available