描述
Automated Wafer Coater / Developer System配置
- Supplies three different resists and two developers - Can load up to 25 wafers for batch coating and developing process - Has spray-coating capabilities - Automatic resist dispensing - Controllable topside and bottom side Edge bead removal - 4 hotplates and two chill plates for Soft and/or Hard baking - A robot can load the wafers in to any of the coat, bake, chill and develop stations Materials provided in EVG 150 include: - 3 resists (SPRTM 700-1.0, SPRTM 220-3.0 and AZ4620) - 2 developers (AZ300-MIF and CD-26) Not working due to a computer issueOEM 代工型號說明
Automated resist processing system providing high-throughput performance and supporting wafers up to 300 mm in diameter文檔
無文檔
EVGroup (EVG)
EVG150
已驗證
類別
Coaters & Developers
上次驗證: 超過30天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
65000
晶圓尺寸:
4"/100mm, 6"/150mm
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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EVGroup (EVG)
EVG150
類別
Coaters & Developers
上次驗證: 超過30天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
65000
晶圓尺寸:
4"/100mm, 6"/150mm
年份:
未知
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Automated Wafer Coater / Developer System配置
- Supplies three different resists and two developers - Can load up to 25 wafers for batch coating and developing process - Has spray-coating capabilities - Automatic resist dispensing - Controllable topside and bottom side Edge bead removal - 4 hotplates and two chill plates for Soft and/or Hard baking - A robot can load the wafers in to any of the coat, bake, chill and develop stations Materials provided in EVG 150 include: - 3 resists (SPRTM 700-1.0, SPRTM 220-3.0 and AZ4620) - 2 developers (AZ300-MIF and CD-26) Not working due to a computer issueOEM 代工型號說明
Automated resist processing system providing high-throughput performance and supporting wafers up to 300 mm in diameter文檔
無文檔