描述
Still in use in cleanroom. Complete and operational.配置
-Automatic (batch) spin-coating and development – 100mm and 150mm wafers – 2 photoresist dispense lines + 2 syringe lines – 2 photoresist developer lines (spray or puddle) – Spray-coating option – Resists: AZ 1512 HS, AZ 10XT-60, LOR 5AOEM 代工型號說明
Automated resist processing system providing high-throughput performance and supporting wafers up to 300 mm in diameter文檔
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EVGroup (EVG)
EVG150
已驗證
類別
Coaters & Developers
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
Installed / Running
產品編號:
96201
晶圓尺寸:
4"/100mm
年份:
2004
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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EVGroup (EVG)
EVG150
類別
Coaters & Developers
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
Installed / Running
產品編號:
96201
晶圓尺寸:
4"/100mm
年份:
2004
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Still in use in cleanroom. Complete and operational.配置
-Automatic (batch) spin-coating and development – 100mm and 150mm wafers – 2 photoresist dispense lines + 2 syringe lines – 2 photoresist developer lines (spray or puddle) – Spray-coating option – Resists: AZ 1512 HS, AZ 10XT-60, LOR 5AOEM 代工型號說明
Automated resist processing system providing high-throughput performance and supporting wafers up to 300 mm in diameter文檔
無文檔