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描述
W CMP ( 2 complete with HDD)配置
無配置OEM 代工型號說明
This 300mm CPM system uses EBARA’s Dry-In/ Dry-Out processing and two-head/ two platen design for maximum operation flexibility. Features include 3-step cleaning, 4 FOUP loading ports, and buff stations.文檔
無文檔
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EBARA
F-REX300
類別
CMP
上次驗證: 10 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
118715
晶圓尺寸:
12"/300mm
年份:
未知
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描述
W CMP ( 2 complete with HDD)配置
無配置OEM 代工型號說明
This 300mm CPM system uses EBARA’s Dry-In/ Dry-Out processing and two-head/ two platen design for maximum operation flexibility. Features include 3-step cleaning, 4 FOUP loading ports, and buff stations.文檔
無文檔