描述
Only ever had silicon slurry and SC1 chemistry aboard配置
2xMPTI(5 CHAMBER) heads 2 extra/spare headsOEM 代工型號說明
This 300mm CPM system uses EBARA’s Dry-In/ Dry-Out processing and two-head/ two platen design for maximum operation flexibility. Features include 3-step cleaning, 4 FOUP loading ports, and buff stations.文檔
無文檔
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EBARA
F-REX300
類別
CMP
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
Installed / Running
產品編號:
127105
晶圓尺寸:
12"/300mm
年份:
2001
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Only ever had silicon slurry and SC1 chemistry aboard配置
2xMPTI(5 CHAMBER) heads 2 extra/spare headsOEM 代工型號說明
This 300mm CPM system uses EBARA’s Dry-In/ Dry-Out processing and two-head/ two platen design for maximum operation flexibility. Features include 3-step cleaning, 4 FOUP loading ports, and buff stations.文檔
無文檔