描述
無描述配置
Software Version Standard CIM SECS GEM Process EBARA/F-REX-300/CMP TUNGSTEN Main System Main Tool 1 OK Handler System Standard 1 OK Factory Interface FOUP 4 OKOEM 代工型號說明
This 300mm CPM system uses EBARA’s Dry-In/ Dry-Out processing and two-head/ two platen design for maximum operation flexibility. Features include 3-step cleaning, 4 FOUP loading ports, and buff stations.文檔
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EBARA
F-REX300
已驗證
類別
CMP
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
105057
晶圓尺寸:
12"/300mm
年份:
2010
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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EBARA
F-REX300
類別
CMP
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
105057
晶圓尺寸:
12"/300mm
年份:
2010
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述配置
Software Version Standard CIM SECS GEM Process EBARA/F-REX-300/CMP TUNGSTEN Main System Main Tool 1 OK Handler System Standard 1 OK Factory Interface FOUP 4 OKOEM 代工型號說明
This 300mm CPM system uses EBARA’s Dry-In/ Dry-Out processing and two-head/ two platen design for maximum operation flexibility. Features include 3-step cleaning, 4 FOUP loading ports, and buff stations.文檔
無文檔