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553-9015 CG4000 3PORT 569-6874 Dry pumps I/F unit "F" 15m 554-0745 Loadport 553-9223 New Edge Roughness Measurement 553-9224 Defect Review I/F (All) 553-9225 Flat scan function 553-9226 GCC function 567-9573 DS/T-PC link connection license 569-7918 P I/O sensor 569-7094 MPPC Measurement function 569-0462 Line width roughness analysis function 553-0064 Modification of wafer holder SQ512221 Loadport specification SQ512222 Mini environment specification 553-9815 GEM300 SQ512232 ARAMS/EPT SQ512241 Signal light tower 553-9267 100nm Standard Microscale (PC) 569-7098 Lowest Vacc 200V modification 569-9626 Offline Recipe V3 Applying FunctionOEM 代工型號說明
The CG4000 is a cutting-edge solution for process applications, offering advanced functions that enhance both precision and efficiency. Its high-accuracy averaged CD (ACD) metrology function improves repeatability and throughput, while its industry-standard line edge roughness (LER) measurement function contributes significantly to process monitoring. These features make the CG4000 an essential tool for maintaining high standards in process applications.文檔
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HITACHI
CG4000
類別
CD-SEM
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
106605
晶圓尺寸:
未知
年份:
2006
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描述
無描述配置
553-9015 CG4000 3PORT 569-6874 Dry pumps I/F unit "F" 15m 554-0745 Loadport 553-9223 New Edge Roughness Measurement 553-9224 Defect Review I/F (All) 553-9225 Flat scan function 553-9226 GCC function 567-9573 DS/T-PC link connection license 569-7918 P I/O sensor 569-7094 MPPC Measurement function 569-0462 Line width roughness analysis function 553-0064 Modification of wafer holder SQ512221 Loadport specification SQ512222 Mini environment specification 553-9815 GEM300 SQ512232 ARAMS/EPT SQ512241 Signal light tower 553-9267 100nm Standard Microscale (PC) 569-7098 Lowest Vacc 200V modification 569-9626 Offline Recipe V3 Applying FunctionOEM 代工型號說明
The CG4000 is a cutting-edge solution for process applications, offering advanced functions that enhance both precision and efficiency. Its high-accuracy averaged CD (ACD) metrology function improves repeatability and throughput, while its industry-standard line edge roughness (LER) measurement function contributes significantly to process monitoring. These features make the CG4000 an essential tool for maintaining high standards in process applications.文檔
無文檔