描述
Dimensions & weight estimates: Mainframe dim (cm): 85 x 110 x 155 Mainframe weight (kg): 200配置
"Gasonics L3510 - Asher 200mm convertible: Yes Robot upgrade: HINE Hatm 5.0 atmospheric robot arm Process Gasses: O2 and N2OEM 代工型號說明
PEP3510A is a dry chemistry downstream processing system for photoresist removal, manufactured by GaSonics. It incorporates the company’s proprietary microwave downstream processing technology and is designed for advanced IC manufacturers. The system can handle feature sizes of 0.25 microns and below, with throughput rates ranging from approximately 45 to 55 wafers per hour.文檔
無文檔
類別
Ashers / Plasma Cleaner
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
132528
晶圓尺寸:
6"/150mm
年份:
1995
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH / NOVELLUS / GASONICS
L3510
類別
Ashers / Plasma Cleaner
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
132528
晶圓尺寸:
6"/150mm
年份:
1995
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Dimensions & weight estimates: Mainframe dim (cm): 85 x 110 x 155 Mainframe weight (kg): 200配置
"Gasonics L3510 - Asher 200mm convertible: Yes Robot upgrade: HINE Hatm 5.0 atmospheric robot arm Process Gasses: O2 and N2OEM 代工型號說明
PEP3510A is a dry chemistry downstream processing system for photoresist removal, manufactured by GaSonics. It incorporates the company’s proprietary microwave downstream processing technology and is designed for advanced IC manufacturers. The system can handle feature sizes of 0.25 microns and below, with throughput rates ranging from approximately 45 to 55 wafers per hour.文檔
無文檔