June 24, 2016 - FormFactor Completes Acquisition of Cascade Microtech
FormFactor, Inc. (NASDAQ: FORM) helps semiconductor manufacturers test the integrated circuits (ICs) that power consumer mobile devices, as well as computing, automotive and other applications. The company is one of the world’s leading providers of essential wafer test technologies and expertise, with an extensive portfolio of high-performance probe cards for DRAM, Flash and SoC devices. Cascade Microtech’s leading-edge stations, probes, probe cards, advanced thermal subsystems and integrated systems deliver precision accuracy and superior performance both in the lab and during production manufacturing of high-speed and high-density semiconductor chips.

The Cascade Microtech Summit 12000 is a semi-automatic thermal wafer prober that allows you to access the full measurement range of your test instrumentation. It reduces noise, leakage, stray capacitance and measurement settling times1. The Summit 12000 probe station is designed for high-performance RF/microwave measurements and is ideal for on-wafer device characterization

FORM FACTOR / CASCADE MICROTECH / FRT

SUMMIT 12000

The Alessi REL-4800 series is 8-inch Manual Probe Station.

ALESSI REL-4800

ALESSI REL-4100A

ALESSI REL-4500

This probe station is suited for semiautomatic step-and-repeat testing. As the station moves from die to die, your wafer map specifies which die are tested. Test results can be printed or saved to data files.

ALESSI REL-6100

SUMMIT 12000 AP

Supports wafer sizes and shards from 0.5 in. (1 mm) to up to 12 in. (300mm)
Semi-Automatic Probe Station

S300

REL 5000

The Cascade Microtech Summit 11000 is a manual wafer prober that allows you to access the full measurement range of your test instrumentation. It reduces noise, leakage, stray capacitance and measurement settling times. The Summit 11000 probe station is designed for high-performance RF/microwave measurements and is ideal for on-wafer device characterization

SUMMIT 11000

ALESSI REL-5500

PS-21

Vacuum zones for differentsized wafers 50 mm, 100 mm, 150 mm, 200 mm

AP200

300 mm Semi-/Fully-automated Probe System.
The CM300 offers measurement accuracy and reliability in a solution that is completely modular – whether it’s I-V/C-V, RTN and RF measurements in one semi-automated system, or a fully-automated dual-prober system that handles any combination of 200 mm and 300 mm wafers. With renowned Cascade Microtech precision measurement expertise, you can confidently deliver accurate and reliable data for current and evolving device technologies. By that the CM300 provides faster lifetime predictability in the reliability process, and less design iterations in the modeling process. Productivity and efficiency are increased with the ability to test over a wide temperature range, and to maintain probe-to-pad accuracy for testing  on small pads down to 40 µm.

CM300

The FRT MicroProf® 300 is part of the high-performance and versatile MicroProf generation and features our established SurfaceSens technology. The tool is particularly useful in quality assurance, development and manufacturing, where the smallest deviations from the ideal surface shape must be determined contact-free without destroying the sample, with surface precision down to the sub-μm range. Besides roughness of the sample surface, shape is one of the most important parameters. Narrow tolerances must be precisely determined. The FRT MicroProf 300 is perfect for these requirements and can also be integrated into fully automated production. An extensive range of sensors and the option of conducting double-sided sample inspections (TTV) make it possible to individual adapt the MicroProf 300 to suit your measuring task at any time. Furthermore, the simple automation of measurements boosts productivity and process reliability.

MICROPROF 300

Probe station platform, semi-automated with MicroChamber, AttoGuard and PureLine technology

SUMMIT 12000B-AP

300 mm Manual Probe System. Cascade PM300 probe system from FormFactor is the ideal solution for engineering tests of 300 mm wafers and substrates. Whatever your application, the versatility of the PM300 meets all requirements from failure analysis (FA) to device and wafer characterization (DWC) to wafer-level reliability (WLR) testing and always ensures the highest accuracy. With the optional square chuck, the PM300 can be also used for testing of flat panel displays.

PM300

M150

The PA300 is a precise and flexible semi-automated test solution for wafers and substrates up to 300 mm. It is ideal for failure analysis (FA), device characterization and modeling from DC to 500 GHz.

PA300

ALESSI REL-3200

300 mm Semi-/ Fully-automated Probe System. The CM300xi is a wafer probe station for wafer sizes up to 300 mm (12 inch). It meets the measurement challenges brought on by extremely complex requirements, such as unattended testing on small pads over time and at multiple temperatures.

CM300xi

SQ-DSM-01

The PM8 is designed to provide a highly stable, ergonomic and flexible probing platform for precise analytical probing applications up to 200 mm, such as device and wafer characterizations, failure analysis (FA), RF/mmW and sub-THz probing, opto-engineering and MEMS.

Intended use IV/CV, RF/mmW, Failure analysis, Wafer level reliability, Sillicon photonics, Niche production, High volume engineering.

CM300xi-S

SUMMIT 9000

ALESSI REL-484X

ALESSI REL-482X

The PA200 Probe Station was designed to be a highly precise and flexible semi-automated test solution for wafers and substrates up to 200 mm. The PA200 gives you reliable probing and precise measurements on decreasing pad and feature sizes down to the submicron range. It is ideal for failure analysis (FA), RF and mm-wave applications up to 500 GHz, as well as for opto-engineering and MEMS tests.

PA200

ALESSI REL-613X

REL 12000	

ALESSI REL-616X

ALESSI REL-615X

Optimized for 1/f Low noise CV Niche production High volume engineering

SUMMIT 200-AP

ALESSI REL-617X

11000 B

Optimized for IV/CV RF/ (mmW/THz), High power RF Opto, Wafer level reliability Niche production High volume engineering.

SUMMIT 200-M

The MPS150 is an easy to use, yet highly-precise manual probe platform for wafers and substrates up to 150 mm. It supports a wide variety of applications and accessories. The modular and flexible design allows to configure and individualize the system to match application requirements. With the System Integration for Measurement Accuracy (SIGMA™) kit, MPS150 can be seamlessly integrated with third-party instrumentation, ensuring the shortest signal path. 

MPS150

ALESSI REL-612X

ALESSI REL-483XHT

The Cascade Summit 11000 allows you to access the full range of your test instruments. Optimized for 1/f Low noise CV.

SUMMIT 11000-AP

200 mm Semi-/ Fully-automated Probe System

SUMMIT 200

ALESSI REL-486X

The Cascade Summit 11000 allows you to access the full range of your test instruments. Optimized for IV/CV, RF/mmW/THz, Opto, Wafer level reliability.

SUMMIT 11000-M

SUMMIT 12000B-HS

ALESSI REL-487X

DCM 200

PA200DS BLUERAY

300 mm Semi-/ Fully-automated Probe System for Ultra Low Noise Measurements

CM300xi ULN

200 mm semi-/ fully-automated production probe system

PA200 BLUERAY

Intended use for IV/CV Failure analysis Wafer level reliability

PM300 PS

Probe station platform, manual, standard.

SUMMIT 11000B-S

CM300-F: CM300, fully-shielded EMI-shielded system for low-current and low-noise measurements (full thermal range).

CM300-F

Optimized for IV/CV (coax) RF/ (mmW/THz) Niche production High volume engineering.

SUMMIT 200-S

A dedicated 200 mm manual probing solution for mmW, THz and load pull applications.

EPS200MMW

MH2-B

200 mm manual/ semi-automated on-wafer power device characterization system. Designed specifically for accurate power device measurements at the wafer level, the Tesla on-wafer power device characterization system is engineered to provide probing levels of up to 3,000 V (triaxial), 10,000 V (coaxial) and 200 A standard or 600 A high current. It supports a measurement temperature range of -55ºC to 300ºC. In combination with FormFactor's patented MicroChamber®, the Tesla features a high-power, gold-plated chuck to ensure low-contact resistance, thin-wafer handling and power dissipation; all while providing a low-noise, fully guarded and shielded test environment. To ensure the utmost safety during a high-voltage measurement, the Tesla 200 mm power device characterization system (T200) employs a certified safety interlock system integrated with an ergonomic clear enclosure or infrared laser light curtain.  

T200

 Probe station platform, semi-automated, standard

SUMMIT 12000B-S

ALESSI REL-485X

Probe station platform, manual with MicroChamber.

SUMMIT 11000B-M

ALESSI REL-482XHT

CM300-O: CM300, open system Open system (ambient to high temperature).

CM300-O

CM300-S: CM300, shielded Shielded system for low-temperature and dark environment (full thermal range).

CM300-S

MICROPROF 200

ALESSI REL-483X

200 mm On-Wafer Power Semiconductor Probing System. Designed specifically for IGBT/power MOSFET  (GaN, SiC, Si) device measurements at the wafer level, the new TESLA200 on-wafer power semiconductor probing system is engineered to provide accurate data up to 3,000 V (triaxial) / 10,000 V (coaxial) and 200 A (standard) / 600 A (high current). With next generation test capabilities, anti-arcing solutions, wafer automation, and support for both engineering probes and T.I.P.S. “LuPo” High Voltage / High Power Probe Cards, the TESLA200 now enables complete thermal testing (-55ºC to 300ºC) with fully-automatic thin / TAIKO wafer loading. One system covers all on-wafer high power test needs, from R&D to niche production.

TESLA200

ALESSI REL-613XHT

A complete 200 mm manual probing solution for RF applications up to 67 GHz.

EPS200RF

300 mm On-Wafer Power Semiconductor Probing System. The TESLA300 Advanced On-Wafer Power Semiconductor Probe System is an integrated high-power test solution that enables collection of accurate high-voltage and high-current measurement data, with complete operator safety.

TESLA300

CM300xi-F

ALESSI REL-612XHT

SUMMIT 5000

Probe station platform, manual with MicroChamber, AttoGuard and PureLine technology.

SUMMIT 11000B-AP

RF-1

Probe station platform, semi-automated with MicroChamber

SUMMIT 12000B-M

ALESSI REL-614X

EPS150TESLA

300 mm Semi-/ Fully-automated Probe System with Autonomous Silicon Photonics Measurement Assistant. The CM300xi-SiPh 300 mm probe station is the first verified integrated measurement solution on the market that enables engineering and production-proven, optimized optical measurements right after installation – without further development. Equipped with the unique Autonomous SiPh Measurement Assistant it provides a groundbreaking set of functions that precisely calibrate the optical positioning hardware to the probe station and verify the performance of the integrated system.

FORM FACTOR / CASCADE MICROTECH / FRT

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