描述
GaN SEZ配置
無配置OEM 代工型號說明
The SEZ 4200 is a single wafer processing system that combines SEZ’s process capability with high throughput and reliability. It uses a dual arm robot to transport 200mm wafers from four cassettes to four process chambers, using one media for all chambers. The media can be recycled, heated, and filtered within the system or used in single pass mode. The system has an object-oriented software architecture with a Sematech compliant GUI and touch screen for easy operation. It has a cost-effective throughput/footprint ratio and competitive CoO. Options like Endpoint Detection System, ozone processing, and SMIF ensure application solutions that meet and exceed customer needs. Supported applications include polymer removal, metal pre-clean, and layer stripping.文檔
無文檔
類別
Wet Etch
上次驗證: 25 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
151455
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
LAM RESEARCH / SEZ
SP4200
類別
Wet Etch
上次驗證: 25 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
151455
晶圓尺寸:
未知
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
GaN SEZ配置
無配置OEM 代工型號說明
The SEZ 4200 is a single wafer processing system that combines SEZ’s process capability with high throughput and reliability. It uses a dual arm robot to transport 200mm wafers from four cassettes to four process chambers, using one media for all chambers. The media can be recycled, heated, and filtered within the system or used in single pass mode. The system has an object-oriented software architecture with a Sematech compliant GUI and touch screen for easy operation. It has a cost-effective throughput/footprint ratio and competitive CoO. Options like Endpoint Detection System, ozone processing, and SMIF ensure application solutions that meet and exceed customer needs. Supported applications include polymer removal, metal pre-clean, and layer stripping.文檔
無文檔