描述
Single Wafer Processing配置
Vintage 2011, this system has already undergone extensive refurbishment Included: FFU RDM (installed but can be removed) Exhaust Up Ultrasonic Flowmeter 5 x Lauda Heat Exchanger (=max possible) Standard Handling 200mm N2 / DI included in Med Arm Standard Pin Chuck 200mm (NC type) Open Cassette Shutter Front and Rear Keyboard & Display 3xCDS Type “E” including RAID controller 400V AC Transformator if needed * Chuckdrive / Elevating unit bearings & motors & toothed belts * robot controller ESC200 * Brooks robot ATM407B * ECO Gripper moving parts * Lauda heat exchangers * Ionizer spikes * Chuck Pins * some CAN bus modules * Keyboard and KVM switch * partly chemical valves * SW backup Main Unit & CDS includedOEM 代工型號說明
The SEZ 203 Spin-Processor is a single wafer processing system that can use up to three different chemical solutions in a programmable sequence for processing wafers. It is capable of processing wafers with sizes of 125mm, 150mm, and 200mm. It has options like Endpoint Detection System, ozone processing, and contamination-free robot handling. It supports applications such as Photolithography Yield Enhancement, Back Surface Metal Clean, and Silicon Etch. The system can recycle, heat, and filter chemical solutions or use them in a single pass mode.文檔
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LAM RESEARCH / SEZ
SP203
已驗證
類別
Wet Etch
上次驗證: 24 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
83131
晶圓尺寸:
8"/200mm
年份:
2011
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH / SEZ
SP203
類別
Wet Etch
上次驗證: 24 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
83131
晶圓尺寸:
8"/200mm
年份:
2011
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Single Wafer Processing配置
Vintage 2011, this system has already undergone extensive refurbishment Included: FFU RDM (installed but can be removed) Exhaust Up Ultrasonic Flowmeter 5 x Lauda Heat Exchanger (=max possible) Standard Handling 200mm N2 / DI included in Med Arm Standard Pin Chuck 200mm (NC type) Open Cassette Shutter Front and Rear Keyboard & Display 3xCDS Type “E” including RAID controller 400V AC Transformator if needed * Chuckdrive / Elevating unit bearings & motors & toothed belts * robot controller ESC200 * Brooks robot ATM407B * ECO Gripper moving parts * Lauda heat exchangers * Ionizer spikes * Chuck Pins * some CAN bus modules * Keyboard and KVM switch * partly chemical valves * SW backup Main Unit & CDS includedOEM 代工型號說明
The SEZ 203 Spin-Processor is a single wafer processing system that can use up to three different chemical solutions in a programmable sequence for processing wafers. It is capable of processing wafers with sizes of 125mm, 150mm, and 200mm. It has options like Endpoint Detection System, ozone processing, and contamination-free robot handling. It supports applications such as Photolithography Yield Enhancement, Back Surface Metal Clean, and Silicon Etch. The system can recycle, heat, and filter chemical solutions or use them in a single pass mode.文檔
無文檔