概述

From its inception to the first delivery in 2013, the Triton platform was designed to be a stable but modular workhorse for all single-wafer wet-processes. The modular build of our tools enables our customer to configure the tool for a mass-production single-process tool as well as a swiss-army knife R&D or prototyping tool – without affecting performance or reliability. -Processing of 3” to 450 mm substrates -Possibility of processing two to three different substrate sizes with minimal or no reconfiguration – and no requalification of the chamber -Patented High-Speed Plating for better throughput and better uniformity – without changing the chemistry