描述
HiK backside cleans with HF and HF/HNO3, Frontside SPM post ash, trench hardmask removal with HF/H2SO4 (IBM paid tool) - MPC3,MPC4 Nitric配置
無配置OEM 代工型號說明
The 'SU-3100' Single-wafer cleaning system. Up to 8 built-in chambers and superior 300 wafer per hour productivity.文檔
無文檔
類別
Wet Benches - Auto
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
128084
晶圓尺寸:
12"/300mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
類似上架商品
查看全部
SCREEN / DNS / DAINIPPON SCREEN
SU-3100
類別
Wet Benches - Auto
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
128084
晶圓尺寸:
12"/300mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
HiK backside cleans with HF and HF/HNO3, Frontside SPM post ash, trench hardmask removal with HF/H2SO4 (IBM paid tool) - MPC3,MPC4 Nitric配置
無配置OEM 代工型號說明
The 'SU-3100' Single-wafer cleaning system. Up to 8 built-in chambers and superior 300 wafer per hour productivity.文檔
無文檔