描述
Tool is set up to run 8" and 12". The faith transfer system is set up for both sizes as well. Ozone generator is the only mentionable missing part. There may be some minor fittings and things along those lines. All other major components are included, some listed below after double confirming. Dryer is intact Robot intact Freight transfer system intact Control module intact Dual tanks intact Water heaters intact *Megasonics - have not been used in a while, they typically have to be replaced anyway so this shouldn't be an issue.配置
Process - SC1, HF, O3 2 process tanks and a Yield up dryer Process is insitu, using SC1 and then HF/ozone, but this can be modified The ozone module is no longer part of the tool. 200/300mm I-clean gama with cassette less process.OEM 代工型號說明
The AKRION GAMA is a series of automated wet stations that are flexible and modular. They are suitable for a wide variety of cleaning, etching and stripping applications for bare and reclaimed silicon wafers, IC devices, MEMS and photomasks. The GAMA series is designed to provide high throughput and precision cleaning for semiconductor manufacturing processes.文檔
無文檔
AKRION
GAMA
已驗證
類別
Wet Benches - Auto
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
Deinstalled / Uncrated
產品編號:
39987
晶圓尺寸:
未知
年份:
2007
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
AKRION
GAMA
類別
Wet Benches - Auto
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
Deinstalled / Uncrated
產品編號:
39987
晶圓尺寸:
未知
年份:
2007
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Tool is set up to run 8" and 12". The faith transfer system is set up for both sizes as well. Ozone generator is the only mentionable missing part. There may be some minor fittings and things along those lines. All other major components are included, some listed below after double confirming. Dryer is intact Robot intact Freight transfer system intact Control module intact Dual tanks intact Water heaters intact *Megasonics - have not been used in a while, they typically have to be replaced anyway so this shouldn't be an issue.配置
Process - SC1, HF, O3 2 process tanks and a Yield up dryer Process is insitu, using SC1 and then HF/ozone, but this can be modified The ozone module is no longer part of the tool. 200/300mm I-clean gama with cassette less process.OEM 代工型號說明
The AKRION GAMA is a series of automated wet stations that are flexible and modular. They are suitable for a wide variety of cleaning, etching and stripping applications for bare and reclaimed silicon wafers, IC devices, MEMS and photomasks. The GAMA series is designed to provide high throughput and precision cleaning for semiconductor manufacturing processes.文檔
無文檔