概述

Synergy is a cleaning technology that combines OnTrak’s Double-Sided Scrubbing (DSS®) technology with in-situ chemical etching, resulting in a new level of cleaning called Chemical Mechanical Cleaning (CMC™). This single-step process offers maximum cleaning performance while maintaining high throughput. Synergy makes use of high-purity chemicals to extend cleaning capability to include embedded particle removal, trace metal removal, and damaged oxide layer removal.