描述
無描述配置
無配置OEM 代工型號說明
The DFP8140 is a fully automatic polisher made by DISCO Corporation. It is a dry polisher for Φ8-inch wafers with chemical-free stress relief. This dry polisher can remove the grinding damage layer on the backsides of wafers up to Φ8 inches without slurry. This process greatly reduces wafer breakage and warpage and improves die strength and product yield. The DFP8140 is designed to polish wafers of diameter Φ4/5/6/8 inch (select one size) using an anomalous in-feed grinding with wafer rotation method. It uses a Φ300 mm dry polishing wheel and a porous chuck table with vacuum chuck-method. The chuck table has a revolution speed range of 0-300 min-1 and is cleaned using water & air thrust up, leveling stone and brush cleaning. The spindle has an output of 4.8 kW and a revolution speed range of 1,000-4,000 min-1. The machine dimensions are 1,200 × 2,670 × 1,800 mm (W×D×H) and it weighs approximately 1,900 kg.文檔
無文檔
DISCO
DFP8140
已驗證
類別
Wafer Polishing
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
101711
晶圓尺寸:
未知
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
DISCO
DFP8140
類別
Wafer Polishing
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
101711
晶圓尺寸:
未知
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述配置
無配置OEM 代工型號說明
The DFP8140 is a fully automatic polisher made by DISCO Corporation. It is a dry polisher for Φ8-inch wafers with chemical-free stress relief. This dry polisher can remove the grinding damage layer on the backsides of wafers up to Φ8 inches without slurry. This process greatly reduces wafer breakage and warpage and improves die strength and product yield. The DFP8140 is designed to polish wafers of diameter Φ4/5/6/8 inch (select one size) using an anomalous in-feed grinding with wafer rotation method. It uses a Φ300 mm dry polishing wheel and a porous chuck table with vacuum chuck-method. The chuck table has a revolution speed range of 0-300 min-1 and is cleaned using water & air thrust up, leveling stone and brush cleaning. The spindle has an output of 4.8 kW and a revolution speed range of 1,000-4,000 min-1. The machine dimensions are 1,200 × 2,670 × 1,800 mm (W×D×H) and it weighs approximately 1,900 kg.文檔
無文檔