
描述
Purpose: Vapor MEMS Release -Use for silicon sacrificial layer removal (Etching) -Single wafer process in vacuum chamber -Process Temperature can be 5oC to >100oC配置
Chemicals: HF Process type: Single wafer Pumping system: -Ebara AA200WN*2 -Ebara AA40WN*2 (1 for service and 1 for spare) Local Scrubber: Kanken Techno KW300OEM 代工型號說明
未提供文檔
無文檔
類別
Wafer Handling
上次驗證: 2 天前
關鍵商品詳情
條件:
New
作業狀態:
未知
產品編號:
147939
晶圓尺寸:
未知
年份:
2021
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
memsstar
Orbis 3000
類別
Wafer Handling
上次驗證: 2 天前
關鍵商品詳情
條件:
New
作業狀態:
未知
產品編號:
147939
晶圓尺寸:
未知
年份:
2021
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Purpose: Vapor MEMS Release -Use for silicon sacrificial layer removal (Etching) -Single wafer process in vacuum chamber -Process Temperature can be 5oC to >100oC配置
Chemicals: HF Process type: Single wafer Pumping system: -Ebara AA200WN*2 -Ebara AA40WN*2 (1 for service and 1 for spare) Local Scrubber: Kanken Techno KW300OEM 代工型號說明
未提供文檔
無文檔