描述

Reticle Stocker

配置

· Wafer Size: 150mm · System safely transfers reticle between 3 different reticle boxes: RSP, blank and shipping boxes · Four main modules: BBO, CSO, SCARA, and Utility module · SCARA module: o Centralized mask handling SCARA robot o Handoff station o Environment control: two fan filter units (FFU’s), two ionizing bars, and three static tips for measuring ambient air pressure · BBO (blank box opener) module: removes box lid, rotates the box 90degress to present mask to SCARA robot, and has its own environmental control o Automation partition door o Environment control: single FFU, ionizer bar, yellow filtered utility light, operator access door with interlocking switch, electro-magnetic locks, two static tips for measuring ambient air pressure · CSO (Clam Shell opener) module: open lid of clam shell type shipping removes box lid, present mask to SCARA robot, and has its own environmental control o Automation partition door o Environment control: single FFU, ionizer bar, yellow filtered utility light, operator access door with interlocking switch, electro-magnetic locks, two static tips for measuring ambient air pressure · Utility module: Houses all system electronics, pneumatics, and vacuum distribution. Fully partitioned from mask handling operations and so maintains only fab ambient pressure and cleanliness o AC power distribution o Controllers: SCARA robot controller, BBO controller, pneumatics/vacuum distribution o PC o HMI differential pressure gauge (w/ switch and two diff. pressure switches) · In addition, Lamina 203 system is equipped with front light tower, front/back/side EMO, and ON/OFF buttons. · System control via touch screen (GUI) mounted on the system, or by remote HSMS communication.