
描述
Equipment front-end module配置
(Qty 2) Load ports Brooks robot part number: 121655 FIXLOAD 6" FabExpress Brooks robot controller part number: 105947 P/N: 701-0401-01ROEM 代工型號說明
The Brooks Automation 109752-199 is the model designation for a 300mm Equipment Front End Module (EFEM), specifically utilized in the FabExpress family of atmospheric wafer transfer and cabinet automation systems.文檔
無文檔
類別
Wafer Handling
上次驗證: 4 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
153153
晶圓尺寸:
12"/300mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
BROOKS / PRI AUTOMATION
109752-199
類別
Wafer Handling
上次驗證: 4 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
153153
晶圓尺寸:
12"/300mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Equipment front-end module配置
(Qty 2) Load ports Brooks robot part number: 121655 FIXLOAD 6" FabExpress Brooks robot controller part number: 105947 P/N: 701-0401-01ROEM 代工型號說明
The Brooks Automation 109752-199 is the model designation for a 300mm Equipment Front End Module (EFEM), specifically utilized in the FabExpress family of atmospheric wafer transfer and cabinet automation systems.文檔
無文檔