描述
無描述配置
-150/200mm wafer transfer, sorting, merge, notch/flat align, wafer ID(OCR) -Wafer ID & Wafer mapping support AUTO upload -On-line/Off-line SECSII/GEM automatic connection -Applies to Class 1000 -Chinese and English operation interface -Applicable to various of foup -Long MTBF and easy maintenance -Stage Qty : 1~4 port -Wafer ID(OCR) success rate 99% -WPH : 450 pcs w/o OCROEM 代工型號說明
The Spartan™ EFEM is a next-generation 300mm front-end automation solution designed by Asyst. It offers quick start-up, higher throughput, reduced particle levels, and easy integration into 300mm automated fabs. Its central datum structure serves as a single reference standard for all wafer handling components and movement, allowing for easy alignment and setup. The Spartan™ EFEM features an optimized minienvironment for best-in-class cleanliness, fast swap time performance, and easy integration, serviceability, and maintainability.文檔
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ASYST
SPARTAN
已驗證
類別
Wafer Handling
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
60881
晶圓尺寸:
未知
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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ASYST
SPARTAN
類別
Wafer Handling
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
60881
晶圓尺寸:
未知
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述配置
-150/200mm wafer transfer, sorting, merge, notch/flat align, wafer ID(OCR) -Wafer ID & Wafer mapping support AUTO upload -On-line/Off-line SECSII/GEM automatic connection -Applies to Class 1000 -Chinese and English operation interface -Applicable to various of foup -Long MTBF and easy maintenance -Stage Qty : 1~4 port -Wafer ID(OCR) success rate 99% -WPH : 450 pcs w/o OCROEM 代工型號說明
The Spartan™ EFEM is a next-generation 300mm front-end automation solution designed by Asyst. It offers quick start-up, higher throughput, reduced particle levels, and easy integration into 300mm automated fabs. Its central datum structure serves as a single reference standard for all wafer handling components and movement, allowing for easy alignment and setup. The Spartan™ EFEM features an optimized minienvironment for best-in-class cleanliness, fast swap time performance, and easy integration, serviceability, and maintainability.文檔
無文檔