描述
N&K 5700 CDRT Metrology system Broadband spectrometry for film thickness and trench profile measurements on photomask reticles.配置
Working potsize: R = 50um, T < 400um The n&k 5700-CDRT automated system is designed for handling 5” or 6” square masks. The n&k 5700-CDRT simultaneously determines thickness, n and k in the spectral range of 190-1000nm, and trench profile. These systems provide non-destructive, real time, high throughput measurements directly on the device and collect polarized reflectance and transmission data (in the spectral range from 190-1000 nm) at the same point. These systems encompass advanced pattern recognition software, patented microspot measurement technology and a unique all-reflective optical based system. This system includes a polarizer and special trench analysis software and provides non-destructive, real-time measurements of CD, trench depth, and profile.OEM 代工型號說明
未提供文檔
無文檔
N & K
5700 CDRT
已驗證
類別
Thin Film / Film Thickness
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
66006
晶圓尺寸:
未知
年份:
2006
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
N & K
5700 CDRT
類別
Thin Film / Film Thickness
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
66006
晶圓尺寸:
未知
年份:
2006
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
N&K 5700 CDRT Metrology system Broadband spectrometry for film thickness and trench profile measurements on photomask reticles.配置
Working potsize: R = 50um, T < 400um The n&k 5700-CDRT automated system is designed for handling 5” or 6” square masks. The n&k 5700-CDRT simultaneously determines thickness, n and k in the spectral range of 190-1000nm, and trench profile. These systems provide non-destructive, real time, high throughput measurements directly on the device and collect polarized reflectance and transmission data (in the spectral range from 190-1000 nm) at the same point. These systems encompass advanced pattern recognition software, patented microspot measurement technology and a unique all-reflective optical based system. This system includes a polarizer and special trench analysis software and provides non-destructive, real-time measurements of CD, trench depth, and profile.OEM 代工型號說明
未提供文檔
無文檔