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描述
NO MISSING PARTS Software - Version Summit 2.61 CIM - SECS Process - Film Thickness measurement tool配置
Hardware Configuration ( FAB ) System Type Description Quantity Status Main System Main body 1 OK Others NA 0 OK Factory Interface SMIF 1 OK Handler System Robot & Pre-aligner 1 OK Options System NA 0 OK Hardware Configuration (Subfab/Auxilliary Units ) Description Quantity Status NA 0 Ok Missing/Faulty Parts / Accesorries List Description Quantity NA 0OEM 代工型號說明
The Prometrix UV-1280SE is a production thin film measurement system that combines dual-beam spectrophotometry and broadband spectroscopic ellipsometry. It can directly measure film thickness, refractive index, and extinction coefficient of single- and multi-layer thin film stacks simultaneously. The system is easy to use, lowers cost of ownership, and increases production efficiency. It is useful for both process control and advanced materials development.文檔
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KLA
UV-1280SE
類別
Thin Film / Film Thickness
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
121275
晶圓尺寸:
未知
年份:
1999
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