概述

The Opti-Probe 7341 is a thin-film and critical dimension (CD) metrology tool that is part of Therma-Wave’s Opti-Probe line of thin-film measurement tools. It delivers a metrology solution for high-volume 65nm chip production to semiconductor manufacturers, yielding better precision and productivity than earlier generation tools. Comprehensive field data for the Opti-Probe-7341 demonstrates an improvement in performance for its customers’ most critical thin-film and optical CD applications by a factor of up to two times.