KLA-Tencor Corporation announced it has completed its acquisition of Therma-Wave Corporation.
Therma-Wave develops, manufactures, and sells process control metrology systems used in the manufacture of semiconductors.

KLA / THERMA-WAVE

OP-3290i

Measurement system. Spectrometer detector. Series-7, a new universal 200/300mm platform, builds on the OP-5000 technologies. Delivering higher productivity and enhanced optics to address advanced thin-film applications, it improves upon industry requirements for on-product wafer measurement resulting in lower COO and extendibility to the customer.

OP-7340

OP-5300 Series has expanded OP-5200 series wafer measurement capability to 300 millimeters.

OP-5341

Integrated OP-3260 system with DUV reflectance.

OP-3260 DUV

Integrated BPR with a newly patented optical technology, BPE, to enhance measurement capabilities for very thin-films.

OP-2000

Introduced a new, patented optical technology, BPR®, to measure thin-film deposition and removal.

OP-1000

The THERMAWAVE OP 5340 metrology system is used for complex thin film thickness measurement on 150mm, 200mm, and 300mm wafers. The THERMAWAVE OP 5340 has 65nm IC Production Accuracy. The THERMAWAVE OP 5340 is capable of directly interfacing with automated material handling systems.
OP-5300 Series has expanded OP-5200 series wafer measurement capability to 300 millimeters.

OP-5340

The Opti-Probe 7341XP is a thin-film and critical dimension (CD) metrology tool developed by Therma-Wave. It is an extension of their widely deployed Opti-Probe line of thin-film measurement tools and delivers a metrology solution for high-volume 65nm chip production that yields better precision and productivity than earlier generation Opti-Probes. The tool has demonstrated an improvement in performance for its customers’ most critical thin-film and optical CD applications by a factor of up to two times. It leverages Therma-Wave’s field-proven Series-7 Opti-Probe platform, which combines five distinct film measurement technologies needed to meet the increasingly complex demands of process control. 

OP-7341XP

The Opti-Probe 3260 (OP-3260) is a metrology tool developed by Therma-Wave that offers a 30% increase in productivity. It has the same thick and thin film measurement capabilities as the original Opti-Probe, making it the only choice for measuring TiN t, n, and k in the UV range down to 190nm. The OP-3260 also features better robotics, Pentium-speed processing, a spectrometric light source that can be changed in 15 minutes without optics recalibration, and the surest pattern recognition in the business. These improvements result in a significant jump in productivity, making it easier to turn out more wafers.

OP-3260

The Opti-Probe 3290 is a thin film measurement system that uses Beam Profile Reflectrometry (BPR) for thick dielectric films greater than 500A and Beam Profile Ellipsometry (BPE) for thin dielectric films less than 500A. It has a thermo electrically cooled diode laser with a wavelength of 675 nm and a tungsten halogen lamp for spectrometry mode with a range of 450 to 840 nm. The system can measure film thickness, index of refraction, extinction coefficient, and reflectivity for multiple layers and multiple parameters. It also provides automated defect review, enabling rapid correction of defects for improved quality.

OP-3290

OP-1600

OP 2600B

The OP-5230 is part of the Opti-Probe Thin and Thick Film Measurement System, specifically the OP-5200 Series. This series integrates up to five measurement technologies, including BPR (Back Pressure Regulator), BPE (Bipolar Electrode), DUV (Deep Ultraviolet) reflectance, Spectroscopic Ellipsometry, and AE (Absolute Ellipsometry). This integration allows for comprehensive and accurate measurement of various physical properties of thin and thick films.

OP 5230

The OP-5220 is part of the Opti-Probe Thin and Thick Film Measurement System, specifically the OP-5200 Series. This series integrates up to five measurement technologies, including BPR (Back Pressure Regulator), BPE (Bipolar Electrode), DUV (Deep Ultraviolet) reflectance, Spectroscopic Ellipsometry, and AE (Absolute Ellipsometry). This integration allows for comprehensive and accurate measurement of various physical properties of thin and thick films.

OP-5220

OP-5340C

The Opti-Probe 3290 DUV is a metrology tool used for measuring TiN t, n, and k in the UV range down to 190 nm.

OP-3290 DUV

OP-3290 DUVi

Series-7 is a universal 200/300mm platform that builds on the OP-5000 technologies. It delivers higher productivity and enhanced optics to address advanced thin-film applications. It improves upon industry requirements for on-product wafer measurement resulting in lower COO and extendibility to the customer.

OP-7000

The Therma-Wave Opti-Probe 2600 is a metrology system that supports Beam Profile Reflectometry (BPR) and Beam Profile Ellipsometry (BPE) modes. A 675 nm thermoelectrically cooled diode laser is used to establish the optical parameter and in spectrometry mode, a visible 450 to 840 nm tungsten halogen lamp is used. The system integrates BPR, BPE, and Spectrometry to further expand its measurement capabilities.

OP-2600

The Opti-Probe 5240 is a tool designed to meet thin film metrology requirements. It offers full spectrum Spectroscopic Ellipsometry to directly measure optical constants, Absolute Ellipsometry to accurately characterize your thinnest films.

OP-5240

OP-2600 DUV has integrated deep ultra-violet reflectance, or DUV, with the existing system to expand measurement range.

OP-2600 DUV

OP-2690

The Opti-Probe 7341 is a thin-film and critical dimension (CD) metrology tool that is part of Therma-Wave’s Opti-Probe line of thin-film measurement tools. It delivers a metrology solution for high-volume 65nm chip production to semiconductor manufacturers, yielding better precision and productivity than earlier generation tools. Comprehensive field data for the Opti-Probe-7341 demonstrates an improvement in performance for its customers’ most critical thin-film and optical CD applications by a factor of up to two times.

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KLA / THERMA-WAVE

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OP-5340

OP-3260

OP-1600

OP-7341XP

OP-5340

OP-3260

OP-1600

OP-7341XP

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