描述
• High throughput due to fast cycling, load-lockdesign • Better reproducibility and higher yields because of complete programmed sequencing • Improved step coverage with 2R source-to-substrate spacing • Single dome for lift-off processes • Minimized EIB source and substrate heater contamination since lower chamber is isolated • Clean, convenient operation in laminar flow hood because of low profile construction • Canted-dome planetary fixturing possible in full capacity chamber • Manual semiautomatic or fully automatic operation due to modular systems designs • Multimetal deposition capability with optional sources Temescal Technical Engineering Services (T.E.S.) TES FC-1800 Load Locked E-Beam Evaporator配置
無配置OEM 代工型號說明
未提供文檔
無文檔
類別
Thermal Evaporators
上次驗證: 19 天前
關鍵商品詳情
條件:
Refurbished
作業狀態:
未知
產品編號:
138625
晶圓尺寸:
4"/100mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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FERROTEC / TEMESCAL
FC 1800
類別
Thermal Evaporators
上次驗證: 19 天前
關鍵商品詳情
條件:
Refurbished
作業狀態:
未知
產品編號:
138625
晶圓尺寸:
4"/100mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
• High throughput due to fast cycling, load-lockdesign • Better reproducibility and higher yields because of complete programmed sequencing • Improved step coverage with 2R source-to-substrate spacing • Single dome for lift-off processes • Minimized EIB source and substrate heater contamination since lower chamber is isolated • Clean, convenient operation in laminar flow hood because of low profile construction • Canted-dome planetary fixturing possible in full capacity chamber • Manual semiautomatic or fully automatic operation due to modular systems designs • Multimetal deposition capability with optional sources Temescal Technical Engineering Services (T.E.S.) TES FC-1800 Load Locked E-Beam Evaporator配置
無配置OEM 代工型號說明
未提供文檔
無文檔