描述
DISCO DTU1531 Water Temperature Control Unit Manufacturer: DISCO Model: DTU1531 Equipment Type: Water Temperature Control Unit Application: Spindle Coolant / Grinding Water Temperature Range: 20–25°C (Spindle Coolant) Temperature Accuracy: Within ±1°C Cooling Capacity: 1.5 kW / 6.3 kW Heating Capacity: 12.5 kW (Grinding Water) Flow Rate: 15 / 25 L/min Dimensions (W × D × H): 330 × 1,550 × 875 mm Weight: Approx. 280 kg (when full) Designed for temperature control of spindle coolant and grinding water in semiconductor wafer processing equipment.配置
無配置OEM 代工型號說明
Discontinued Mar. 2020文檔
無文檔
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DISCO
DTU1531
類別
Support Equipment
上次驗證: 8 天前
關鍵商品詳情
條件:
Used
作業狀態:
Deinstalled
產品編號:
153597
晶圓尺寸:
未知
年份:
2007
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
DISCO DTU1531 Water Temperature Control Unit Manufacturer: DISCO Model: DTU1531 Equipment Type: Water Temperature Control Unit Application: Spindle Coolant / Grinding Water Temperature Range: 20–25°C (Spindle Coolant) Temperature Accuracy: Within ±1°C Cooling Capacity: 1.5 kW / 6.3 kW Heating Capacity: 12.5 kW (Grinding Water) Flow Rate: 15 / 25 L/min Dimensions (W × D × H): 330 × 1,550 × 875 mm Weight: Approx. 280 kg (when full) Designed for temperature control of spindle coolant and grinding water in semiconductor wafer processing equipment.配置
無配置OEM 代工型號說明
Discontinued Mar. 2020文檔
無文檔