描述
i-Line Wide-Field Stepper配置
無配置OEM 代工型號說明
i-Line The NSR-SF155 is the seventh generation SF system. The SF155 design incorporates the groundbreaking Skyhook platform of the SF150 system, but includes key performance enhancements. Like the SF150, the SF155 uses optimized load and unload positioning to reduce wafer exchange time, along with increased alignment processing speed to shorten wafer alignment time. The SF155 uses the same lightweight wafer stage as the SF150, but minimizes stage settling time to further boost system throughput. These recent design optimizations enable the SF155 to deliver more than 200 wafers (300 mm) per hour. NSR-SF155 (resolution ≦ 280 nm).文檔
無文檔
NIKON
NSR-SF155
類別
Steppers & Scanners
上次驗證: 19 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
147530
晶圓尺寸:
12"/300mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
i-Line Wide-Field Stepper配置
無配置OEM 代工型號說明
i-Line The NSR-SF155 is the seventh generation SF system. The SF155 design incorporates the groundbreaking Skyhook platform of the SF150 system, but includes key performance enhancements. Like the SF150, the SF155 uses optimized load and unload positioning to reduce wafer exchange time, along with increased alignment processing speed to shorten wafer alignment time. The SF155 uses the same lightweight wafer stage as the SF150, but minimizes stage settling time to further boost system throughput. These recent design optimizations enable the SF155 to deliver more than 200 wafers (300 mm) per hour. NSR-SF155 (resolution ≦ 280 nm).文檔
無文檔