描述
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Configuration Requirement Original temperature: 23° Original Altitude normal pressure: 755mmHg Lens type: Nikon standard Rack type: Right Type Wafer Carrier Table: Left Reticle Library: Center Main unit with 0.68 NA (Auto Variable , SHRINC Conventional) Sigma 0.75 Pellicle reticle loader (PRL) YES System for 6” reticle 6 Inch (NON-SMIF) 25mm X 33mm field size YES LSA system YES FIA l//system YES Illumination model: (Conventional, Annular,) 8” wafer loader (WL Type-3), 8”ceramic holder, Flat ZONE: In 6 O'clock FLAT Type 8Inch Pellicle reticle detector YES BMU Type Standard Pre-alignment non contact pre-alignment Non Contact Chip leveling YES NEMA Box YES Tool software MCSV : 3.44 Laser Type Giga Photon Chamber Type Asahi N5Z1102 (2000.02)OEM 代工型號說明
The system offers a resolution of 150 nm or better with a numerical aperture (NA) of 0.68. It utilizes a KrF excimer laser with a wavelength of 248 nm as the exposure light source. The reduction ratio is 1:4, and the exposure field measures 25 × 33 mm. The alignment accuracy, using the EGA method with |M| + 3σ, is equal to or less than 35 nm.文檔
NIKON
NSR-S204B
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類別
Steppers & Scanners
上次驗證: 7 天前
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Used
作業狀態:
未知
產品編號:
118460
晶圓尺寸:
未知
年份:
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NIKON
NSR-S204B
類別
Steppers & Scanners
上次驗證: 7 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
118460
晶圓尺寸:
未知
年份:
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available