描述

Lens Data IU Flare = 0.84% Lens Flare = 8.50% Uniformity = 6.00% Power = 541 mW/cm2 Total Focus Deviation = 0.202 µm Astigmatism = 0.119 µm Coma = 0.040 µm Iso DOF = .275 µm Photolithography Scanner 248nm Software Version - MCSV CIM - SECS Excluded Items List (Pumps, Chillers & Abatement are all excluded)

配置

Handler System: WL Type 3 Factory Interface: Open Cassette

OEM 代工型號說明

Stepper. NSR-S203B (resolution ≦ 180 nm). Ability to mass manufacture ICs with ultra-high-precision circuitry–specifically, sub-0.18µm minimum-pattern linewidth.