描述
i-line stepper配置
Known issues: LLTC circulation pump has failed LC power supply unit STAKPAK2 IST4-1404-W01 (600 W) has failed System: VAX 4000/96 Wafer stage: 6” chuck Reticle alignment: ISS / SRA / VRA Wafer alignment: LSA / FIA Cassettes: Left / right / extra Control rack position: Right Reticle loader: 5” reticle size; option library; 24 slots Auto focus: Multi Wafer loader: Type 2 A3 OF type: Flat Flatzone direction: 6 o’clock In-line: No PPD: Installed Barcode system: Installed Environment chamber: Asahi N2A-D Illumination: SLOT1, CONV ID; L-NA 0.57; I-NA 0.34 Hg lamp illumination: 632.847 mW/cm² average; 1.150% uniformity Wafer local flatness: 0.690 µm Lens distortion: X maximum 0.019 µm; X minimum -0.020 µm; Y maximum 0.013 µm; Y minimum -0.047 µm Stepping: X 3σ 0.020 µm; Y 3σ 0.023 µm; X backlash 3σ 0.027 µm; Y backlash 3σ 0.023 µm Software: MCSV Ver.231D; OCSV Ver.231A; TOOL Ver.243B Base kit: BASE7_101-0306A Reticle barcode reader: Nikon Code Alignment sensors: LSA / FIA, 15/20 mm field Workstation: VAX Station 4000.96 (VS49K-AC) Environment chamber: N2A-D; dated 2/1996OEM 代工型號說明
The NSR-2205i11C is equipped with a resolution of 450nm or better and features a numerical aperture (NA) of 0.57. It utilizes an i-line (365nm) exposure light source and has a reduction ratio of 1:5. The exposure field ranges from a 22mm square to 17.9(H) x 25.2(V)mm. The alignment accuracy, using the EGA method, is 70nm or better. The system comes with the LSA alignment system as standard and offers the optional FIA and LIA alignment systems.文檔
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類別
Steppers & Scanners
上次驗證: 10 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
153211
晶圓尺寸:
6"/150mm
年份:
1997
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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NIKON
NSR-2205i11C
類別
Steppers & Scanners
上次驗證: 10 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
153211
晶圓尺寸:
6"/150mm
年份:
1997
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
i-line stepper配置
Known issues: LLTC circulation pump has failed LC power supply unit STAKPAK2 IST4-1404-W01 (600 W) has failed System: VAX 4000/96 Wafer stage: 6” chuck Reticle alignment: ISS / SRA / VRA Wafer alignment: LSA / FIA Cassettes: Left / right / extra Control rack position: Right Reticle loader: 5” reticle size; option library; 24 slots Auto focus: Multi Wafer loader: Type 2 A3 OF type: Flat Flatzone direction: 6 o’clock In-line: No PPD: Installed Barcode system: Installed Environment chamber: Asahi N2A-D Illumination: SLOT1, CONV ID; L-NA 0.57; I-NA 0.34 Hg lamp illumination: 632.847 mW/cm² average; 1.150% uniformity Wafer local flatness: 0.690 µm Lens distortion: X maximum 0.019 µm; X minimum -0.020 µm; Y maximum 0.013 µm; Y minimum -0.047 µm Stepping: X 3σ 0.020 µm; Y 3σ 0.023 µm; X backlash 3σ 0.027 µm; Y backlash 3σ 0.023 µm Software: MCSV Ver.231D; OCSV Ver.231A; TOOL Ver.243B Base kit: BASE7_101-0306A Reticle barcode reader: Nikon Code Alignment sensors: LSA / FIA, 15/20 mm field Workstation: VAX Station 4000.96 (VS49K-AC) Environment chamber: N2A-D; dated 2/1996OEM 代工型號說明
The NSR-2205i11C is equipped with a resolution of 450nm or better and features a numerical aperture (NA) of 0.57. It utilizes an i-line (365nm) exposure light source and has a reduction ratio of 1:5. The exposure field ranges from a 22mm square to 17.9(H) x 25.2(V)mm. The alignment accuracy, using the EGA method, is 70nm or better. The system comes with the LSA alignment system as standard and offers the optional FIA and LIA alignment systems.文檔
無文檔