描述
無描述配置
Model : NSR-2205i11D • Temprature: 23°C • Chamber Type :ASAHI N2B-B • NA Variable System : Yes • Reticle Size : 6“(normal) • Reticle microscope : Fix • MAX Field Size : 22mm • PPD : No • Reticle Barcode Reader : No (on RETICLE) • Reticle SMIF : No • Extend R-Library : No • Reticle Case : 6“ ⚫ Wafer : Flat 4” (8inch Notch) ⚫ Pre Alignment2 : Yes ⚫ Wafer Loader : Type2 ⚫ Chip Leveling : Yes ⚫ In-Line : No ⚫ Wafer Carrier Table : Left,Right ⚫ Alignment sensor : LSA, FIA ⚫ Rack Type : Right i12 Type Rack) ⚫ Body-OP Ruck cable : 3m(normal) ⚫ Wafer edge Exposure : No ⚫ Lamp Power : 1.75Kw(Normal) ⚫ Illumination : SHRINC1 ⚫ Signal Tower : NoOEM 代工型號說明
The Nikon NSR-2205i11D is a step-and-repeat scanning system with a resolution of 350nm or better and a NA of 0.63. It uses an i-line (365nm) exposure light source and has a reduction ratio of 1:5. The exposure field ranges from 22mm square to 17.9(H) x 25.2(V)mm. The alignment accuracy is 70nm or better and the alignment system is LSA (standard), FIA (optional), LIA (optional). I hope that helps! Let me know if you have any other questions.文檔
類別
Steppers & Scanners
上次驗證: 29 天前
關鍵商品詳情
條件:
Refurbished
作業狀態:
未知
產品編號:
132909
晶圓尺寸:
8"/200mm
年份:
1995
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
NIKON
NSR-2005i11D
類別
Steppers & Scanners
上次驗證: 29 天前
關鍵商品詳情
條件:
Refurbished
作業狀態:
未知
產品編號:
132909
晶圓尺寸:
8"/200mm
年份:
1995
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available