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CANON FPA-6000AS4
    描述
    System Issues: 1.Reticle stage leakage 2.PLC temp abnormal Cymer XLA 130 laser 2.Cymer chamber(MO/PA) damaged
    配置
    ArF scanner (4X) Includes a Canon FPA-60000AS4 main body, Cymer laser, and chiller.
    OEM 代工型號說明
    The FPA-6000AS4 is an ArF scanner that is the industry’s fastest and has the highest NA (0.85). It can project features as small as 85nm and is built on Canon’s new 140-wph, F2-capable FPA-6000 single-stage platform. It provides a cost-optimized solution for high volume 300mm or 200mm exposure processes for leading-edge device manufacturers choosing a mix-and-match strategy. The scanner has a 0.85-NA, 4:1 reduction lens system and is capable of 85-nanometer resolution with an overlay precision of 18nm.
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    CANON

    FPA-6000AS4

    verified-listing-icon

    已驗證

    類別
    Steppers & Scanners

    上次驗證: 13 天前

    關鍵商品詳情

    條件:

    Used


    作業狀態:

    Installed / Idle


    產品編號:

    115820


    晶圓尺寸:

    未知


    年份:

    2004


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
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    Available
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    CANON FPA-6000AS4

    CANON

    FPA-6000AS4

    Steppers & Scanners
    年份: 2004條件: 二手
    上次驗證13 天前

    CANON

    FPA-6000AS4

    verified-listing-icon
    已驗證
    類別
    Steppers & Scanners
    上次驗證: 13 天前
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    關鍵商品詳情

    條件:

    Used


    作業狀態:

    Installed / Idle


    產品編號:

    115820


    晶圓尺寸:

    未知


    年份:

    2004


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    描述
    System Issues: 1.Reticle stage leakage 2.PLC temp abnormal Cymer XLA 130 laser 2.Cymer chamber(MO/PA) damaged
    配置
    ArF scanner (4X) Includes a Canon FPA-60000AS4 main body, Cymer laser, and chiller.
    OEM 代工型號說明
    The FPA-6000AS4 is an ArF scanner that is the industry’s fastest and has the highest NA (0.85). It can project features as small as 85nm and is built on Canon’s new 140-wph, F2-capable FPA-6000 single-stage platform. It provides a cost-optimized solution for high volume 300mm or 200mm exposure processes for leading-edge device manufacturers choosing a mix-and-match strategy. The scanner has a 0.85-NA, 4:1 reduction lens system and is capable of 85-nanometer resolution with an overlay precision of 18nm.
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