描述
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The FPA-3000EX6 features the first stepper lens that is specifically designed for use with Canon's new IDEAL resolution enhancement technique. IDEAL multilevel imaging is Canon's new method for achieving a process k1 factor of 0.3 with ordinary optical lithography tools. Using IDEAL, the EX6 can image circuit features below 120nm with good process latitude. While IDEAL enables optical lithography to resolve circuit patterns smaller than one-half the wavelength of the illumination light, it also requires a lens with an extremely low wavefront aberration.文檔
類別
Steppers & Scanners
上次驗證: 3 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
141211
晶圓尺寸:
8"/200mm
年份:
2002
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
CANON
FPA-3000EX6
類別
Steppers & Scanners
上次驗證: 3 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
141211
晶圓尺寸:
8"/200mm
年份:
2002
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available