描述
Exterior Dimensions Width 74.803 in (190.0 cm) Depth 98.425 in (250.0 cm) Height 102.362 in (260.0 cm) Weight 12,787 lb (5,800 kg)配置
無配置OEM 代工型號說明
The Canon FPA-3000EX5 is a high throughput excimer-laser stepper designed for critical layer mass production of 64Mb and 256Mb DRAMs and next-generation microprocessors. It offers a 23% higher throughput than its predecessor, the EX4, with a throughput of more than 90 wafers per hour. It has the industry’s best optical performance and maintains compatibility with existing Canon 5x i-line step-and-repeat tools. The EX5 has a newly designed projection lens with a numerical aperture (NA) of 0.63 and 0.22µm resolution in an exposure area of 22mm x 22mm. It also has an on-the-fly focusing system, an improved advanced global alignment (AGA) scheme, and a high-output Cymer 5000 series excimer laser source. The FPA-3000EX5 stepper shares many of the same technology innovations as other models in Canon’s i-line stepper family, making it an efficient mix-and-match partner with existing critical-layer and rough-layer steppers.文檔
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類別
Steppers & Scanners
上次驗證: 今日
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
142287
晶圓尺寸:
8"/200mm
年份:
1998
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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CANON
FPA-3000EX5
類別
Steppers & Scanners
上次驗證: 今日
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
142287
晶圓尺寸:
8"/200mm
年份:
1998
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Exterior Dimensions Width 74.803 in (190.0 cm) Depth 98.425 in (250.0 cm) Height 102.362 in (260.0 cm) Weight 12,787 lb (5,800 kg)配置
無配置OEM 代工型號說明
The Canon FPA-3000EX5 is a high throughput excimer-laser stepper designed for critical layer mass production of 64Mb and 256Mb DRAMs and next-generation microprocessors. It offers a 23% higher throughput than its predecessor, the EX4, with a throughput of more than 90 wafers per hour. It has the industry’s best optical performance and maintains compatibility with existing Canon 5x i-line step-and-repeat tools. The EX5 has a newly designed projection lens with a numerical aperture (NA) of 0.63 and 0.22µm resolution in an exposure area of 22mm x 22mm. It also has an on-the-fly focusing system, an improved advanced global alignment (AGA) scheme, and a high-output Cymer 5000 series excimer laser source. The FPA-3000EX5 stepper shares many of the same technology innovations as other models in Canon’s i-line stepper family, making it an efficient mix-and-match partner with existing critical-layer and rough-layer steppers.文檔
無文檔