描述
248NM KRF SCANNER配置
無配置OEM 代工型號說明
The ASML AT 850 is a Steppers and Scanners system. The ASML AT 850 can be used with 248mm Krf stepper size and wafer stage size is 3". The birth of the TWINSCAN platform in 2000 introduced the world to the first dual-wafer stage, still the only dual-stage platform in volume production today. AT:850, had a larger NA, 0.80, allowing imaging to be pushed to 100 nm.文檔
無文檔
類別
Steppers & Scanners
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
128072
晶圓尺寸:
12"/300mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ASML
TWINSCAN AT:850
類別
Steppers & Scanners
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
128072
晶圓尺寸:
12"/300mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
248NM KRF SCANNER配置
無配置OEM 代工型號說明
The ASML AT 850 is a Steppers and Scanners system. The ASML AT 850 can be used with 248mm Krf stepper size and wafer stage size is 3". The birth of the TWINSCAN platform in 2000 introduced the world to the first dual-wafer stage, still the only dual-stage platform in volume production today. AT:850, had a larger NA, 0.80, allowing imaging to be pushed to 100 nm.文檔
無文檔