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TWINSCAN AT:850
概述
The ASML AT 850 is a Steppers and Scanners system. The ASML AT 850 can be used with 248mm Krf stepper size and wafer stage size is 3". The birth of the TWINSCAN platform in 2000 introduced the world to the first dual-wafer stage, still the only dual-stage platform in volume production today. AT:850, had a larger NA, 0.80, allowing imaging to be pushed to 100 nm.
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