描述
Asset Description - 365nm I-line Software Version - 4.1 CIM - secs Process - 65/130nm配置
Handler System: Wfr handler (OK) Factory Interface: FOUP 1 (OK) Main System: Body 1 (OK)OEM 代工型號說明
The productivity enhancements in TWINSCAN C increase wafer output to over 110 wafers per hour for 300 mm wafers at real production conditions (109 exposures per wafer). The TWINSCAN C product family will be available on four systems: the AT:400C, AT:750C, AT:850C and AT:1150C.文檔
無文檔
類別
Steppers & Scanners
上次驗證: 14 天前
關鍵商品詳情
條件:
Used
作業狀態:
Installed / Down
產品編號:
133490
晶圓尺寸:
12"/300mm
年份:
2004
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ASML
TWINSCAN AT:400C
類別
Steppers & Scanners
上次驗證: 14 天前
關鍵商品詳情
條件:
Used
作業狀態:
Installed / Down
產品編號:
133490
晶圓尺寸:
12"/300mm
年份:
2004
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
Asset Description - 365nm I-line Software Version - 4.1 CIM - secs Process - 65/130nm配置
Handler System: Wfr handler (OK) Factory Interface: FOUP 1 (OK) Main System: Body 1 (OK)OEM 代工型號說明
The productivity enhancements in TWINSCAN C increase wafer output to over 110 wafers per hour for 300 mm wafers at real production conditions (109 exposures per wafer). The TWINSCAN C product family will be available on four systems: the AT:400C, AT:750C, AT:850C and AT:1150C.文檔
無文檔