描述
無描述配置
無配置OEM 代工型號說明
The PAS 5500/250C is an i-line stepper specified at a resolution of 0.30 µm. Focal plane deviation, astigmatism, and distortion have all been improved without compromising overlay performance, which is now specified at < 45 nm. Leadership productivity is maintained at more than 93 wph (ATP settings). The PAS 5500/250C uses an AERIAL™ illuminator, which provides flexible and automated NA/Sigma combinations in both conventional and off-axis illumination modes while maintaining high intensities to enable economical mass production of leading-edge devices.文檔
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ASML
PAS 5500/250C
已驗證
類別
Steppers & Scanners
上次驗證: 超過30天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
111906
晶圓尺寸:
未知
年份:
1998
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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ASML
PAS 5500/250C
類別
Steppers & Scanners
上次驗證: 超過30天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
111906
晶圓尺寸:
未知
年份:
1998
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述配置
無配置OEM 代工型號說明
The PAS 5500/250C is an i-line stepper specified at a resolution of 0.30 µm. Focal plane deviation, astigmatism, and distortion have all been improved without compromising overlay performance, which is now specified at < 45 nm. Leadership productivity is maintained at more than 93 wph (ATP settings). The PAS 5500/250C uses an AERIAL™ illuminator, which provides flexible and automated NA/Sigma combinations in both conventional and off-axis illumination modes while maintaining high intensities to enable economical mass production of leading-edge devices.文檔
無文檔