描述
i-Line Stepper配置
無配置OEM 代工型號說明
The PAS 5500/200B is the first stepper to incorporate ASML's revolutionary AERIALTM illuminator, a versatile component that provides both the flexibility to switch between conventional and off-axis illumination modes and the high intensity to enable economical mass production of next-generation devices. The i-line stepper combines 0.35 micron resolution with industry-leading overlay performance of 50nm, or 100nm in machine-to-machine matching.文檔
無文檔
類別
Steppers & Scanners
上次驗證: 3 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
147510
晶圓尺寸:
8"/200mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ASML
PAS 5500 / 200B
類別
Steppers & Scanners
上次驗證: 3 天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
147510
晶圓尺寸:
8"/200mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
i-Line Stepper配置
無配置OEM 代工型號說明
The PAS 5500/200B is the first stepper to incorporate ASML's revolutionary AERIALTM illuminator, a versatile component that provides both the flexibility to switch between conventional and off-axis illumination modes and the high intensity to enable economical mass production of next-generation devices. The i-line stepper combines 0.35 micron resolution with industry-leading overlay performance of 50nm, or 100nm in machine-to-machine matching.文檔
無文檔