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描述
無描述配置
1 Etch chamber, 1 SRD Chamber 4 Heated Tanks (Al, TiW, AU, BOE) 6 Inch clamp shell Rotor Automatic End Point detectionOEM 代工型號說明
The Spray Acid Tool (SAT) is a versatile tool that offers a range of cleaning, etching, and stripping capabilities. It features a multichamber design that allows for safe and economical operation in a completely closed environment. The SAT is 300mm ready, meaning it can handle wafers of that size. Some of the specific applications of the SAT include post-CMP clean, photo-resist strip, polymer removal, pre-diffusion clean, monitor wafer clean, and metal etch. These processes are essential for the preparation and maintenance of semiconductor wafers during the manufacturing process.文檔
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SEMITOOL
SAT
類別
Spray Solvent / Acid
上次驗證: 超過60天前
關鍵商品詳情
條件:
Refurbished
作業狀態:
未知
產品編號:
106134
晶圓尺寸:
未知
年份:
2006
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述配置
1 Etch chamber, 1 SRD Chamber 4 Heated Tanks (Al, TiW, AU, BOE) 6 Inch clamp shell Rotor Automatic End Point detectionOEM 代工型號說明
The Spray Acid Tool (SAT) is a versatile tool that offers a range of cleaning, etching, and stripping capabilities. It features a multichamber design that allows for safe and economical operation in a completely closed environment. The SAT is 300mm ready, meaning it can handle wafers of that size. Some of the specific applications of the SAT include post-CMP clean, photo-resist strip, polymer removal, pre-diffusion clean, monitor wafer clean, and metal etch. These processes are essential for the preparation and maintenance of semiconductor wafers during the manufacturing process.文檔
無文檔