概述

The QS-408M is a manual wafer loading FT-IR system designed for semiconductor material characterization. It incorporates an X-Y stage that allows for unlimited user-defined mapping patterns and contour maps to be generated. The system can accommodate single wafers or slugs of 3" to 200mm, as well as non-standard shape and size silicon substrates. The QS-408M software has communication capability to host computers under the SECS I and II protocols. This makes it a versatile and powerful tool for semiconductor material analysis.